The influence of ambient conditions on properties of MgxZn1−xO films by sputtering
Hui Li, Xiaojun Pan, Min Qiao, Yongzhe Zhang, Tao Wang, Erqing XieVolume:
82
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2007.06.003
File:
PDF, 175 KB
english, 2008