Ion sputtering of cathode surface in a hollow cathode...

Vacuum 2008 Vol. 82; Iss. 5

Ion sputtering of cathode surface in a hollow cathode discharge

Nely Bundaleska, Zoritsa Tomova, Vasilka Steflekova, Dimo Zhechev
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Volume:
82
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2007.06.004
File:
PDF, 144 KB
english, 2008
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