SEM study of defects in PVD hard coatings

Vacuum 2007 Vol. 82; Iss. 2

SEM study of defects in PVD hard coatings

M. Čekada, P. Panjan, D. Kek-Merl, M. Panjan, G. Kapun
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Volume:
82
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2007.07.005
File:
PDF, 1.16 MB
english, 2007
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