Nb-Ti/Al/Ni/Au based ohmic contacts to AlGaN/GaN
G. Vanko, T. Lalinský, Ž. Mozolová, J. Liday, P. Vogrinčič, A. Vincze, F. Uherek, Š. Haščík, I. KostičVolume:
82
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2007.07.020
File:
PDF, 405 KB
english, 2007