SPIE Proceedings [SPIE Smart Structures and Materials - San...

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SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 6 March 2005)] Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology - The nanostructured Origami 3D fabrication and assembly process for nanopatterned 3D structures

In, Hyun J., Arora, William J., Stellman, Paul, Kumar, Sundeep, Yang, Shao-Horn, Smith, Henry I., Barbastathis, George, Varadan, Vijay K.
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Volume:
5763
Year:
2005
Language:
english
DOI:
10.1117/12.600304
File:
PDF, 248 KB
english, 2005
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