Surface and structural disorder in MBE and sputtering...

Surface and structural disorder in MBE and sputtering deposited Cu thin films revealed by X-ray measurements

M. Salvato, A. Aurigemma, A. Tesauro, C. Attanasio
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Volume:
82
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2007.07.058
File:
PDF, 533 KB
english, 2008
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