Fabrication of p-type ZnO thin films via magnetron...

Vacuum 2008 Vol. 82; Iss. 5

Fabrication of p-type ZnO thin films via magnetron sputtering and phosphorus diffusion

Ruiqin Ding, Huiqun Zhu, Qingguang Zeng
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Volume:
82
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2007.08.010
File:
PDF, 279 KB
english, 2008
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