![](/img/cover-not-exists.png)
Growth of carbon with vertically aligned nanoscale flake structure in capacitively coupled rf glow discharge
Hui Zhang, Naoto Kikuchi, Toshihiro Kogure, Eiji KusanoVolume:
82
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.vacuum.2007.11.001
File:
PDF, 845 KB
english, 2008