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Influence of substrate direct current bias voltage on microcrystalline silicon growth during radio-frequency magnetron sputtering
A. Tabata, K. Fukaya, T. MizutaniVolume:
82
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2007.11.004
File:
PDF, 208 KB
english, 2008