Investigation of HfNx-based films by Rutherford...

Investigation of HfNx-based films by Rutherford backscattering spectrometry and X-ray reflectometry

ChangChun Chen, Ping Liu, ChunHua Lu
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Volume:
82
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2007.11.013
File:
PDF, 469 KB
english, 2008
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