Optimisation of secondary electron detector for variable...

Vacuum 2008 Vol. 82; Iss. 10

Optimisation of secondary electron detector for variable pressure SEM with Monte Carlo method

Michał Krysztof, Witold Słówko
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Volume:
82
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2008.01.017
File:
PDF, 297 KB
english, 2008
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