Optical and chemical characterization of thin TiNx films...

Vacuum 2008 Vol. 82; Iss. 10

Optical and chemical characterization of thin TiNx films deposited by DC-magnetron sputtering

Stefan Wrehde, Marion Quaas, Robert Bogdanowicz, Hartmut Steffen, Harm Wulff, Rainer Hippler
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Volume:
82
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2008.01.028
File:
PDF, 439 KB
english, 2008
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