Effects of Deposition Temperature on the Growth...

Key Engineering Materials 2008 Vol. 368-372

Effects of Deposition Temperature on the Growth Characteristics of CVD SiC Coatings

Huo, Yan Li, Chen, Yu Feng
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Volume:
368-372
Year:
2008
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.368-372.846
File:
PDF, 625 KB
english, 2008
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