Effect of the oxygen fraction on the structure and optical...

Vacuum 2008 Vol. 82; Iss. 11

Effect of the oxygen fraction on the structure and optical properties of HfOxNy thin films

Wei Liu, Xiao-ping Su, Shu-yu Zhang, Hong-bin Wang, Jia-he Liu, Lan-qin Yan
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Volume:
82
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2008.01.053
File:
PDF, 794 KB
english, 2008
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