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Control of Refractive Index of Fluorinated Polyimide by Proton Beam Irradiation
Arai, Yukitaka, Ohki, Yoshimichi, Saito, Keisuke, Nishikawa, HiroyukiVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.012601
Date:
January, 2013
File:
PDF, 636 KB
english, 2013