Development of a magnetron sputtering system with an extraordinary strong magnetic field near the target
Hiroshi Ikuta, Kohei Yokouchi, Isao Ohta, Yousuke Yanagi, Yoshitaka ItohVolume:
83
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2008.04.006
File:
PDF, 408 KB
english, 2008