Development of a magnetron sputtering system with an...

Development of a magnetron sputtering system with an extraordinary strong magnetic field near the target

Hiroshi Ikuta, Kohei Yokouchi, Isao Ohta, Yousuke Yanagi, Yoshitaka Itoh
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
83
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2008.04.006
File:
PDF, 408 KB
english, 2008
Conversion to is in progress
Conversion to is failed