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Study of the surface morphology of platinum thin films on powdery substrates prepared by the barrel sputtering system
Akira Taguchi, Mitsuhiro Inoue, Chikako Hiromi, Masaaki Tanizawa, Tomohito Kitami, Takayuki AbeVolume:
83
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2008.04.023
File:
PDF, 1.47 MB
english, 2008