Study of the surface morphology of platinum thin films on...

Study of the surface morphology of platinum thin films on powdery substrates prepared by the barrel sputtering system

Akira Taguchi, Mitsuhiro Inoue, Chikako Hiromi, Masaaki Tanizawa, Tomohito Kitami, Takayuki Abe
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Volume:
83
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2008.04.023
File:
PDF, 1.47 MB
english, 2008
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