SPIE Proceedings [SPIE International Conference on Micro-and Nano-Electronics 2012 - Zvenlgorod, Russian Federation (Monday 1 October 2012)] International Conference Micro- and Nano-Electronics 2012 - Atomic force microscopy for line edge roughness measurements
Sosnina, A. Y., Rogozhin, A. E., Miakonkikh, A. V., Orlikovsky, Alexander A.Volume:
8700
Year:
2013
Language:
english
DOI:
10.1117/12.2017529
File:
PDF, 673 KB
english, 2013