New target materials for innovative applications on glass

Vacuum 2008 Vol. 83; Iss. 3

New target materials for innovative applications on glass

Steven Matthews, Wilmert De Bosscher, Anja Blondeel, John Van Holsbeke, Hilde Delrue
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Volume:
83
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2008.04.065
File:
PDF, 284 KB
english, 2008
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