Measurement of total energy flux density at a substrate...

Vacuum 2008 Vol. 83; Iss. 4

Measurement of total energy flux density at a substrate during TiOx thin film deposition by using a plasma jet system

M. Čada, P. Virostko, Š. Kment, Z. Hubička
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Volume:
83
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.vacuum.2008.05.014
File:
PDF, 348 KB
english, 2008
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