Structural characterization of boron doped hydrogenated...

Structural characterization of boron doped hydrogenated nanocrystalline silicon films

Wensheng Wei, Xunlei Yan
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Volume:
83
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2008.07.006
File:
PDF, 583 KB
english, 2009
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