Saturation effects observed in high fluence heavy ion...

Vacuum 2009 Vol. 83; Iss. 5

Saturation effects observed in high fluence heavy ion implantation at few tens of keV

G. Sahu, S.K. Rath, B. Joseph, G.S. Roy, D.P. Mahapatra
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Volume:
83
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2008.08.005
File:
PDF, 862 KB
english, 2009
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