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Study of SHI induced recrystallization effects in SOI structures synthesized by nitrogen and oxygen ion implantation in silicon
A.D. Yadav, Rucha H. Polji, S.K. Dubey, Saif A. Khan, D.K. AvasthiVolume:
83
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.vacuum.2008.09.008
File:
PDF, 258 KB
english, 2009