Dual-cathode method for sputtering magnetoelastic...

Vacuum 2009 Vol. 83; Iss. 6

Dual-cathode method for sputtering magnetoelastic iron-boron films

Michael L. Johnson, Odum LeVar, Sang H. Yoon, Jung-Hyun Park, Shichu Huang, Dong-Joo Kim, Zhongyang Cheng, Bryan A. Chin
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Volume:
83
Year:
2009
Language:
english
Pages:
7
DOI:
10.1016/j.vacuum.2008.11.004
File:
PDF, 571 KB
english, 2009
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