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Studies on the target conditioning for deposition of LiCoO2 films
C.S. Nimisha, M. Ganapathi, N. Munichandraiah, G. Mohan RaoVolume:
83
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.vacuum.2008.12.002
File:
PDF, 760 KB
english, 2009