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Growth of ITO thin films by magnetron sputtering: OES study, opticaland electrical properties
Aleksandras Iljinas, Irmantas Mockevičius, Mindaugas Andrulevičius, Šarūnas Meškinis, Sigitas TamulevičiusVolume:
83
Year:
2009
Language:
english
Pages:
1
DOI:
10.1016/j.vacuum.2009.01.040
File:
PDF, 231 KB
english, 2009