Growth and properties of the ion beam deposited SiOx containing DLC films
Š. Meškinis, M. Andrulevičius, K. Šlapikas, A. Iljinas, R. Gudaitis, J. Puišo, S. TamulevičiusVolume:
83
Year:
2009
Language:
english
Pages:
1
DOI:
10.1016/j.vacuum.2009.01.041
File:
PDF, 193 KB
english, 2009