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Beam plasma discharge at low magnetic field as plasma source for plasma processing reactor
E.G. Shustin, N.V. Isaev, M.P. Temiryazeva, Yu.V. FedorovVolume:
83
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2009.03.033
File:
PDF, 394 KB
english, 2009