Modification of AZO thin-film properties by annealing and ion etching
S. Flickyngerova, M. Netrvalova, L. Prusakova, I. Novotny, P. Sutta, V. TvarozekVolume:
84
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.vacuum.2009.04.006
File:
PDF, 288 KB
english, 2009