Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering
P. Siffalovic, E. Majkova, L. Chitu, M. Jergel, S. Luby, J. Keckes, G. Maier, A. Timmann, S.V. Roth, T. Tsuru, T. Harada, M. Yamamoto, U. HeinzmannVolume:
84
Year:
2009
Language:
english
Pages:
7
DOI:
10.1016/j.vacuum.2009.04.026
File:
PDF, 648 KB
english, 2009