Impact of SF6 plasma treatment on performance of AlGaN/GaN...

Vacuum 2009 Vol. 84; Iss. 1

Impact of SF6 plasma treatment on performance of AlGaN/GaN HEMT

G. Vanko, T. Lalinský, Š. Haščík, I. Rýger, Ž. Mozolová, J. Škriniarová, M. Tomáška, I. Kostič, A. Vincze
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Volume:
84
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.vacuum.2009.04.032
File:
PDF, 298 KB
english, 2009
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