Calculation and uncertainty evaluation of conductance of a...

Vacuum 2009 Vol. 84; Iss. 1

Calculation and uncertainty evaluation of conductance of a precise orifice for orifice-flow method

Hajime Yoshida, Masanori Shiro, Kenta Arai, Hitoshi Akimichi, Masahiro Hirata
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Volume:
84
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.vacuum.2009.04.033
File:
PDF, 275 KB
english, 2009
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