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Characterization of sputter deposited Au/Ni/Al multilayers on Si substrates
D. Resnik, D. Vrtačnik, U. Aljančič, M. Možek, A. Zalar, S. AmonVolume:
84
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2009.04.067
File:
PDF, 301 KB
english, 2009