Surface acoustic wave excitation on SF6 plasma-treated...

Vacuum 2009 Vol. 84; Iss. 1

Surface acoustic wave excitation on SF6 plasma-treated AlGaN/GaN heterostructure

T. Lalinský, I. Rýger, L. Rufer, G. Vanko, Š. Haščík, Ž. Mozolová, M. Tomáška, A. Vincze, F. Uherek
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
84
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2009.05.010
File:
PDF, 324 KB
english, 2009
Conversion to is in progress
Conversion to is failed