![](/img/cover-not-exists.png)
Oscillations and power-dependent hysteresis in reactive ZnO plasma
Á. Németh, Z. Lábadi, L. Tóth, I. BársonyVolume:
84
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.vacuum.2009.05.011
File:
PDF, 299 KB
english, 2009