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Monitoring plasma etching of biomolecules by imaging ellipsometry
H. Rauscher, K. Stapelmann, O. Kylián, B. Denis, F. RossiVolume:
84
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2009.05.012
File:
PDF, 573 KB
english, 2009