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Structural analysis of amorphous Si films prepared by magnetron sputtering
D. Grozdanić, R. Slunjski, B. Rakvin, P. Dubček, B. Pivac, N. Radić, S. BernstorffVolume:
84
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2009.05.014
File:
PDF, 331 KB
english, 2009