![](/img/cover-not-exists.png)
Ellipsometric characterization of SiOx films with embedded Si nanoparticles
A. Szekeres, E. Vlaikova, T. Lohner, P. Petrik, G. Huhn, K. Havancsak, I. Lisovskyy, S. Zlobin, I.Z. Indutnyy, P.E. ShepeliavyiVolume:
84
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2009.05.016
File:
PDF, 303 KB
english, 2009