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Structural changes studies of a-Si:H films deposited by PECVD under different hydrogen dilutions using various experimental techniques
Veronika Vavruňková, Jarmila Müllerová, Rudolf Srnánek, Pavol ŠuttaVolume:
84
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.vacuum.2009.05.022
File:
PDF, 254 KB
english, 2009