Structural changes studies of a-Si:H films deposited by...

Structural changes studies of a-Si:H films deposited by PECVD under different hydrogen dilutions using various experimental techniques

Veronika Vavruňková, Jarmila Müllerová, Rudolf Srnánek, Pavol Šutta
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Volume:
84
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.vacuum.2009.05.022
File:
PDF, 254 KB
english, 2009
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