ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - Edge Bonding Void Free Low Temperature Oxide-Oxide Direct Bonding Process
Castex, Arnaud, Broekaart, Marcel, Thieffry, Stephane, Landry, Karine, Fontanière, Richard, Lagahe, ChrystelleYear:
2011
Language:
english
DOI:
10.1149/1.3568856
File:
PDF, 913 KB
english, 2011