ECS Transactions [ECS 219th ECS Meeting - Montreal, QC,...

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ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - Edge Bonding Void Free Low Temperature Oxide-Oxide Direct Bonding Process

Castex, Arnaud, Broekaart, Marcel, Thieffry, Stephane, Landry, Karine, Fontanière, Richard, Lagahe, Chrystelle
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Year:
2011
Language:
english
DOI:
10.1149/1.3568856
File:
PDF, 913 KB
english, 2011
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