![](/img/cover-not-exists.png)
Influence of cathode voltage on electrical property and crystal structure of sputter-deposited Ag thin films
Kazuhiro Kato, Hideo Omoto, Atsushi TakamatsuVolume:
84
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2009.06.017
File:
PDF, 530 KB
english, 2009