Influence of cathode voltage on electrical property and...

Influence of cathode voltage on electrical property and crystal structure of sputter-deposited Ag thin films

Kazuhiro Kato, Hideo Omoto, Atsushi Takamatsu
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Volume:
84
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2009.06.017
File:
PDF, 530 KB
english, 2009
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