Spatial distributions of gas composition in rf glow...

Spatial distributions of gas composition in rf glow discharge plasmas measured using a quartz sensor

Atsushi Suzuki, Hidehiko Nonaka
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Volume:
84
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2009.06.037
File:
PDF, 600 KB
english, 2009
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