Effects of image noise on contact edge roughness and...

Effects of image noise on contact edge roughness and critical dimension uniformity measurement in synthesized scanning electron microscope images

Constantoudis, Vassilios, Kuppuswamy, Vijaya-Kumar Murugesan, Gogolides, Evangelos
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Volume:
12
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.12.1.013005
Date:
January, 2013
File:
PDF, 5.80 MB
english, 2013
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