Effects of image noise on contact edge roughness and critical dimension uniformity measurement in synthesized scanning electron microscope images
Constantoudis, Vassilios, Kuppuswamy, Vijaya-Kumar Murugesan, Gogolides, EvangelosVolume:
12
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.12.1.013005
Date:
January, 2013
File:
PDF, 5.80 MB
english, 2013