Determination of Source-and-Drain Series Resistance in 16-nm-Gate FinFET Devices
Su, Ping-Hsun, Li, YimingVolume:
62
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/ted.2015.2418091
Date:
May, 2015
File:
PDF, 1013 KB
english, 2015