Investigation of the plasma uniformity in an internal...

Investigation of the plasma uniformity in an internal linear antenna-type inductively coupled plasma source by applying dual frequency

Gwang Ho Gweon, Jong Hyeuk Lim, Kyong Nam Kim, Seung Pyo Hong, Tae Hong Min, Geun Young Yeom
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Volume:
84
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2009.10.051
File:
PDF, 352 KB
english, 2010
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