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Correlation between thermal properties and aluminum fractions in CrAlN layers deposited by PVD technique
B. Tlili, N. Mustapha, C. Nouveau, Y. Benlatreche, G. Guillemot, M. LambertinVolume:
84
Year:
2010
Language:
english
Pages:
8
DOI:
10.1016/j.vacuum.2010.01.011
File:
PDF, 926 KB
english, 2010