On the geometry control of magnetic devices: Impact of...

Vacuum 2010 Vol. 84; Iss. 9

On the geometry control of magnetic devices: Impact of photo-resist profile, shadowing effect, and material properties

Xilin Peng, Zhongyan Wang, Yongxiong Lu, Brendan Lafferty, Thomas McLaughlin, Mark Ostrowski
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Volume:
84
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.vacuum.2010.01.029
File:
PDF, 878 KB
english, 2010
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