A systematic study of DRIE process for high aspect ratio...

Vacuum 2010 Vol. 84; Iss. 9

A systematic study of DRIE process for high aspect ratio microstructuring

Manish Kumar Hooda, Manoj Wadhwa, Sanjay Verma, M.M. Nayak, P.J. George, A.K. Paul
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Volume:
84
Year:
2010
Language:
english
Pages:
7
DOI:
10.1016/j.vacuum.2010.01.052
File:
PDF, 1.07 MB
english, 2010
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