Characterization of the surface layer due to oxygen for the...

Vacuum 2010 Vol. 85; Iss. 1

Characterization of the surface layer due to oxygen for the hydrogen related C–SiC films

Yu Zou, Ji-fu Du, Hai-yang Dai, Ding Ren, Ning-kang Huang
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Volume:
85
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.vacuum.2010.03.005
File:
PDF, 405 KB
english, 2010
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