![](/img/cover-not-exists.png)
Effects of deposition temperature on structure and properties of mo-doped indium oxide by radio frequency magnetron sputtering
Yang Hai, Zhang Shu-yu, Liu Wei, Yuan Guo, Li Jian-Ming, Su Xiao-pingVolume:
85
Year:
2010
Language:
english
Pages:
3
DOI:
10.1016/j.vacuum.2010.05.016
File:
PDF, 308 KB
english, 2010